• EmCrafts
  • SEM
  • Optional Devices
  • Optional Devices
  • WDS
  • Oxford instruments
  • WDS
  • WDS - Wavelength Dispersive Spectroscopy - complements EDS by offering excellent peak separation, accurate trace element analysis, and optimized element detection for low and high energy X-rays to provide...
    "Microprobe Accuracy on an SEM"
  • Hardware
  • Fully focusing spectrometer
  • 210mm Rowland circle 2Theta range of 33° to 135°
  • Max. Six Crystal Position
  • Elements down to B (Z=5)
  • Diffracting Crystals
    - LSM80N optimized for carbon
    - LSM80E optimized for nitrogen
    - LSM60 optimized for oxygen
    - LSM200 optimized for boron
    - LiF220 crystal
    - LiF200 crystal
    - PET crystal
    - TAP Crystal
  • nstallation – P10 gas (90% argon, 10% methane ) required
  • INCA Software
  • Wavelength Dispersive Spectroscopy (WDS) software, INCAWave, delivers the power of WDS sensitivity and resolution with enhanced productivity.
  • - Accurate quantitative analysis below 500pppm
    - Less than 10eV resolution for resolving
      important overlaps like Sulfur/Molybdenum
    - Easily and unambiguously determines the
      distribution of all elements in a sample even
      where peaks overlap
  • - Up to 100 times more sensitive than an EDS
      system for trace element detection
    - Most accurate elemental analysis available for SEM
    - rivals EPMA accuracy with WD for trace elements
      and ED for major elements using XPP quantitative
      correction algorithms
  • INCAEnergy+ combines WDS and EDS to deliver
    the power of WDS sensitivity and resolution
    with EDS productivity and ease of use.
  • Qualitative analysis with excellent peak separation of
    all X-ray peaks
  • Quantitative analysis including accurate trace element analysis
  • Accurate X-ray mapping of minor elements and overlapping
    X-ray peaks
  • Features
  • Spectral resolution as low as 2eV
  • Excellent detection limits, which are less than 100ppm for many elements
  • Energy range up to 10.8keV
  • Accurate quantitative analysis using the XPP matrix correction algorithm
  • Reliable and robust mechanical design, which has been developed
    over 25 years
  • Successful installations on a wide range of SEMs, conventional, variable
    vacuum, environmental, field emission
  • Proven results on many types of samples, including light elements, and high
    spatial resolution using low beam currents (<5nA)