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  • VERITAS-Series spec
VERITAS-Series specification
Model Veritas-3000 Veritas-3100
Stage Type 5-axis Motorized
- X,Y : 120mm(-60mm ~ 60mm)- Z : 5 ~ 65mm- T : -20° ~ 90°- R : 360°
Vacuum Mode X O
Vacuum Mode High Vacuum Mode (<9×10-3Pa) High Vacuum Mode (<9×10-3Pa)
Low Vacuum Mode(10 ~ 230Pa)
Vacuum System Fully Automated Evacuation System
- Turbo molecular pump (Vacuum ready within 3 minutes)
- Rotary vane pump
- Electrical valve system
Electron Gun Pre-centered Tungsten Filament
Detector SE Detector SE Detector
BSE Detector (4channel, Semiconductor)
Resolution 3.0nm (SE Image at 30kV) 3.0nm (SE Image)
5.0nm (BSE Image)
Magnification x10 ~ x300,000
Acceleration Voltage 200V ~ 30kV
Objective IRIS 20 / 20 / 50 / 100μm (Variable aperture)
Image Shift 100μm
Maximum Sample Size Horizontal : 210mmVertical : 65mm
Advanced Scan Mode Dynamic FocusPoint & Line ScanTilt Compensation
Working Distance 0 ~ 65mm
Automatic Function Auto Brightness & ContrastAuto FocusAuto Gun AlignmentAuto Saturation
Auto FilamentBias
Image Format JPGTIFFBMPPNG
Display Mode Focus Mode : 320 x 240 pixel, Resizable
Preview Mode : 800 x 600
Slow Mode : Applicable to both preview and focus mode
Photo Mode : Up to 3200 x 2400
Dimension(mm) Installation Dimension : 2000 (W) x 800 (D)
- Main System : 800 (W) x 825 (D) x 1500 (H), 200kg
- Rotary Pump : 454 (W) x 134 (D) x 212 (H), 22kg
Supplied Accessories Factory-centered Filament Cartridge 1box(10units)Specimen Mounts 1box(10units), TweezerCarbon TapeHex. Driver 0.89mm (1 ea.)Hex. T Wrench 2.5mm (2 ea.)
Operation Device(PC) Windows 10-based All-in-One 21.5” Workstation100% controlled by keyboard and mouse
Optional Devices Chamber CameraLaB6/Ceb6 upgrade 3D ImagingRaman Spectroscopy
EDS(Energy Dispersive Spectroscopy)EBSD(Electron Back Scattered Diffraction)
WDS(Wavelength Dispersive Spectroscopy)CL(Cathodoluminescence) Image
E-beam Lithography
Power Supply Single Phase : 100 ~ 240VAC, 50 / 60Hz, 1kVA