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  • 제품안내
  • Optional Devices
  • CL
  • Attolight
  • Application
  • LED performance and reliability.
  • GaN power transistors.
  • Threading Dislocation Density (TDD).
  • Carriers lifetimes and dynamics.
  • Solar cells effi ciency.
  • Development of nanoscale optolectronic devices.
  • ZnO nano-belts.
    The acquisition of a CL map (le) does not affect the detection of secondary electrons(right).
  • Cathodoluminescence is the ideal tool to measure threading dislocations density in GaN (le) ; they
    appear as dark spots because of non radiative recombination in their vicinity. A secondary electron
    scan of the same region cannot identify any threading dislocations (right).
  • Attolight optical microscope features constant resolution and photon collection efficiency over a eld of
    view of 300μm (le). Quantitative cathodoluminescence, i.e. comparison of emission intensities between
    various points is now possible. The traditional parabolic mirror approach is plagued by blur and
    vignetting (right).
Product Specications
  • Measurements Mode
  • Optical microscope imaging.
  • Cathodoluminescence mapping (polychromatic, monochromatic and hyperspectral).
  • Secondary electrons (SE) mapping.
  • Time-resolved cathodoluminescence (time-resolved option).
  • Simultaneous SE and CL imaging.
  • Probe Current
  • E-beam : 1pA to 20 nA.
  • Light Optics
  • Light microscope embedded within the electron optics
  • Fully achromatic reflective objective : 180 nm –1.6 μm
  • Aperture : NA 0.71 (f/0.5)
  • Field of View : >300 μm (electronic and optical)
  • Optical Resolution : <5 μm
  • Light collection efficiency : 30% of the photons emitted by a lambertian emitter exit the
    microscope (constant over the whole eld of view)
  • Photon Detection
  • Dispersive spectrometer with two imaging exits (320 mm focal length) and a 3-grating turret
    (gratings to be specified by customer at time of order).
  • Detectors : PMT (exit 1), CCD (exit 2).
  • Time-Resolved Option
  • 10 ps pulsed photoelectron gun.
  • Detector : UV-VIS streak camera.
  • Chamber and Vacuum System
  • Differential pumping system : ion getter pumps for electron gun and electron column. Turbo molecular
    pump for the specimen chamber. Specimen exchange time : 15 min.
  • Internal chamber dimensions : 208 mm (diameter) x 300 mm (height).
  • Nanopositioning Stage
  • Specimen diameter : ø 25x1.5 mm
  • 6 degrees of freedom for arbitrary movements (compatible with cryostat option)
  • Travel range : 25 mm (X and Y), 3 mm (Z), 3° tilt (X and Y), 35° rotation (Z)
  • Smallest increment : 1nm
  • Repeatability (full travel range) : 100nm
  • Repeatability (100 nm range) : < 2nm
  • Low Temperature Cryostat
  • Helium cold finger for low vibrations.
  • Minimal temperature range : 20K–00K
  • Advanced digital temperature controller.
  • Time and spectrum-resolved cathodoluminescence of Boron Nitride. The spectrum is generated by focusing a pulsed electron beam on a specific point of the specimen. A streak camera is used for the detection. Deep UV spectroscopy becomes as simple as visible spectroscopy
  • Facility Specifications
  • Power : 7 standard wall plugs (230V, 50Hz) delivering 10A each
  • Pressurized air for microscope valves and optical table, pressure of 551 kPa (80psi) max.
  • Nitrogen to purge the chamber
  • Weight : -CL system : 250 kg
                -Optical Table : 650kg
  • Environment: temperature 20°C +/-3°C, relative humidity below 70 % RH